Cantilever beam transducers and methods of fabrication

Details Cantilever beam transducers and methods of fabrication Cantilever beam transducers and methods of fabrication

1987-07-24

1990-02-06

Shaw, Clifford C.

Electrical resistors

Strain gauge type

338 3, G01L 122

Patent

active

048991252

ABSTRACT:
A cantilever beam transducer which is formed by a batch technique utilizing conventional semiconductor processes. The cantilever beam structure has a central aperture which is rectangular in configuration and which is bounded by thinned rib or thinned area sections on either side of the aperture. Each of these areas accommodate a piezoresistive bridge structure which may include a longitudinal and transverse piezoresistive sensor both of which are located on the same surface of the beam within the thinned areas. The resultant cantilever structure has minimum cross-axis sensitivity while the thin ribbed areas enable it to be deflected in directions perpendicular to the main beam surfaces. The cantilever structure further includes top and bottom glass sheets which are anodically bonded to the cantilever structure and which serve as bidirectional stops to prevent excessive forces from damaging the beam.

REFERENCES:
patent: 3602866 (1971-08-01), Saxl
patent: 4424717 (1984-01-01), White
patent: 4432247 (1984-02-01), Takeno et al.
patent: 4716774 (1988-01-01), Bull et al.

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