Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1996-04-25
1998-02-10
Williams, Hezron E.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 528, G01N 2300
Patent
active
057171327
ABSTRACT:
A probe formed in a flexible portion of a cantilever is protected by a protection frame. This protection frame is separated from a support portion at a border of a groove between the protection frame and the support portion. A piezoelectric crystal layer is formed in the flexible portion, and when the flexible portion is bent by an interatomic force acting between the probe and a sample, a voltage induced between the both ends of the piezoelectric crystal layer changes.
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Fujiu Takamitsu
Watanabe Shunji
Larkin Daniel S.
Nikon Corporation
Williams Hezron E.
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