Calibration wafer and kit

Details Calibration wafer and kit Calibration wafer and kit

2005-07-05

2005-07-05

Bennett, G. Bradley (Department: 2859)

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

C414S936000, C033S645000

Reexamination Certificate

active

06914337

ABSTRACT:
A calibration wafer which is suitable for calibrating alignment of a transfer robot blade with respect to wafers in a loadlock chamber or input shuttle. The calibration wafer includes a circular wafer body on which is provided a pair of spaced-apart blade alignment lines which are used to properly align the transfer robot blade. The invention further includes a calibration kit for calibrating alignment of a polishing head with a pedestal, including a base plate for placement on the pedestal; a calibration plate for placement on the base plate; and a calibration circle provided on the calibration plate for aligning the polishing head with the pedestal.

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