Calibration tool for a vertical furnace

Details Calibration tool for a vertical furnace Calibration tool for a vertical furnace

2005-03-22

2005-03-22

Hong, John C. (Department: 3726)

Metal working

Means to assemble or disassemble

Means to assemble electrical device

C029S760000, C073S001010

Reexamination Certificate

active

06868601

ABSTRACT:
A calibration tool for centering an inner tube with respect to an outer tube of a vertical furnace for semiconductor manufacturing including a first alignment member having a plurality of engagement surfaces simultaneously movable radially outward an equal radial distance for engagement with a base structure of a vertical furnace to center the calibration tool with respect to the base structure and the outer tube; a second alignment member having a plurality of engagement surfaces simultaneously movable radially outward an equal radial distance to engage the inner tube and to move the inner tube to a position centered with respect to the outer tube of the vertical furnace.

REFERENCES:
patent: 6463782 (2002-10-01), Shen et al.

Affiliated with

Also associated with

Rating

Calibration tool for a vertical furnace does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Calibration tool for a vertical furnace, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Calibration tool for a vertical furnace will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3378799