Calibration standards for profilometers and methods of producing

Details Calibration standards for profilometers and methods of producing Calibration standards for profilometers and methods of producing

1995-04-10

1996-11-26

Raevis, Robert

Measuring and testing

Instrument proving or calibrating

Volume of flow, speed of flow, volume rate of flow, or mass...

73105, H01L 2120

Patent

active

055787452

ABSTRACT:
Adjacent shaped grooves are placed in single crystal structure with great accuracy and known dimensions by a combination of anisotropic and isotropic etching to produce a scanning probe microscope calibration standard with fine V-shaped grooves forming a prismatically shaped ridge or blade between them. A probe microscope to be calibrated is used to profile the tip of the ridge in a number of places along the length of the ridge. With knowledge of the sidewall angles and tip radius of the calibration standard both the flat tip dimensions of a probe with a flared tip and the tip radius of a probe with a conical tip can be calculated from the profile they produce.

REFERENCES:
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"Dimentional Metrology with Scanning Probe Microscopes" by Joseph E. Griffith et al. Journal of Applied Phys., 1 Nov. 1993, pp. 83-109.
"Method for Imaging Sidewalls by Atomic Force Microscopy" by Y. Martin et al. Appl. Phys. Lett. 64(19), May, 9, 1995, pp. 2498-2500.
Hagen et al., "Specification and Measurement of Surface Finish", Dec. 1953, GML, pp. 35-38.

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