Calibration standard for transmission electron microscopy

Details Calibration standard for transmission electron microscopy Calibration standard for transmission electron microscopy

2007-11-06

2007-11-06

Wells, Nikita (Department: 2881)

Radiant energy

Means to align or position an object relative to a source or...

C250S252100, C250S306000, C250S307000, C250S310000, C250S311000

Reexamination Certificate

active

11237410

ABSTRACT:
A calibration standard includes a silicon substrate having a plurality of defined regions and a plurality of calibration marks placed on respective defined regions of the silicon substrate. Each calibration mark comprises a different calibration dimension indicator and a corresponding dimension identifier. A method for calibrating a transmission electron microscope using the standard comprises positioning the calibration standard in a viewing area of the transmission electron microscope and sequentially viewing the marks and adjusting the calibration of the microscope for each mark viewed.

REFERENCES:
patent: 4837174 (1989-06-01), Peterson
patent: 4862197 (1989-08-01), Stoffel
patent: 6410927 (2002-06-01), Pike
patent: 6477225 (2002-11-01), Morales et al.
patent: 6559456 (2003-05-01), Muraki
patent: 6627903 (2003-09-01), Hirayanagi
patent: 6750447 (2004-06-01), Houge et al.
patent: 6830943 (2004-12-01), Lo et al.
patent: 6864488 (2005-03-01), Muraki
patent: 6875982 (2005-04-01), Bedell et al.
patent: 6897440 (2005-05-01), Yamada
patent: 6967327 (2005-11-01), Yamada
patent: 6982418 (2006-01-01), Yamada
MAG*l*CAL TEM Calibration Specimen, and Sample, from http://www.2spi.com/catalog/standards/magical.shtml, Jul. 27, 2005 (6 pages).

Affiliated with

Also associated with

Rating

Calibration standard for transmission electron microscopy does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Calibration standard for transmission electron microscopy, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Calibration standard for transmission electron microscopy will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3817902