Optics: measuring and testing – Standard
Patent
1995-11-13
1998-03-03
Font, Frank G.
Optics: measuring and testing
Standard
356372, 356373, G01J 102, G01B 1100, G01B 1114
Patent
active
057241341
ABSTRACT:
Apparatus and means for calibrating optical gap-measuring instruments, including a preferred calibration standard (100) comprised of a substantially flat, transparent element (10) held in contact with the convex spherical surface (25) of a substantially opaque element (20) to provide an obvious and unambiguous region over which the gap is zero. The optical gap measuring tool that is to be calibrated is oriented so as to illuminate the interface. The calibration standard (100) is translated in position with respect the gap measuring tool in such a way as to vary the measured gap, while at the same time data storage means record the gap measurement as a function of relative position. This data is then compared to the predicted variation from the geometry of the calibration standard (100). Provided that the elements (10, 20) are of high optical quality, deviations of the measured data from an ideal parabolic curve are indicative of calibration errors.
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Biegen James
de Groot Peter
Deck Leslie
Smythe Robert
Caufield Francis J.
Font Frank G.
Stafira Michael P.
Zygo Corporation
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