Calibration standard

Details Calibration standard Calibration standard

2006-06-16

2008-11-11

Noland, Thomas P (Department: 2856)

Measuring and testing

Instrument proving or calibrating

Displacement, motion, distance, or position

C324S202000

Reexamination Certificate

active

07448250

ABSTRACT:
The invention relates to a calibration standard, especially for the calibration of devices for the non-destructive measurement of the thickness of thin layers, with a carrier layer (12) consisting of a basic material and a standard (17) applied on the carrier layer (12), said standard having the thickness of the layer to be measured at which the device is to be calibrated, with the carrier layer (12) comprising a plane-parallel measuring surface (16) to its bearing surface (14), that the standard (17) comprises a bearing surface (18) plane-parallel with its measuring surface (19) for bearing on the measuring surface (16) of the carrier layer (12), and that the standard (17) is permanently provided on the carrier layer (12) by means of plating by rubbing.

REFERENCES:
patent: 4150288 (1979-04-01), Inoue et al.
patent: 4646341 (1987-02-01), Finer et al.
patent: 4995198 (1991-02-01), Zupanick
patent: 2007/0119229 (2007-05-01), Fischer
patent: 272914 (1989-10-01), None
patent: 1037067 (1983-08-01), None
patent: 1229571 (1986-05-01), None

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