Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-11-21
2006-11-21
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S019000, C702S099000
Reexamination Certificate
active
07139627
ABSTRACT:
Plural processing apparatuses3such as CVD apparatuses31and diffusion apparatuses33, measuring apparatuses5, and a control computer7for management are connected through a LAN9. Each processing apparatuses3stores control data for performing a treatment. The control computer7also stores the control data for the processing apparatuses3. The control computer7makes each processing apparatus perform a treatment for calibration. The control computer7receives a result of the treatment performed by the processing apparatus3to be calibrated, and calibrates the control data stored in the control computer7based on the treatment result. The control computer sends the calibrated control data to the processing apparatus3after completion of the calibration procedure. The processing apparatus3stores the calibrated control data, which is used for subsequently performed treatment.
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Obara Asami
Takenaga Yuichi
Picard Leo
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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