Calibration method in a chip mounting device

Details Calibration method in a chip mounting device Calibration method in a chip mounting device

2004-12-21

2008-03-11

Lebentritt, Michael (Department: 2812)

Semiconductor device manufacturing: process

With measuring or testing

Reexamination Certificate

active

07341877

ABSTRACT:
A method of accurately calibrating a movement control system of mark recognition means in a chip mounting device, comprising the steps of: recognizing a first recognition mark put on a head (2) and a second recognition mark (13) put on a stage (26) with two-field recognition means (7) so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7); and, with the head (2) lowered to position the first recognition mark closely to the second recognition mark (13), recognizing both marks with third recognition means (20) when the two-field recognition means (7) is moved back so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7).

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International Search Report for PCT/JP00/08031 mailed on Dec. 26, 2000.
International Preliminary Examination Report completed on Apr. 11, 2001.

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