Calibration method for surface texture measuring instrument,...

Details Calibration method for surface texture measuring instrument,... Calibration method for surface texture measuring instrument,...

2007-01-09

2007-01-09

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Calibration or correction system

Position measurement

C702S095000, C702S150000, C033S501000, C033S554000, C033S558000, C033S559000, C073S104000, C073S105000

Reexamination Certificate

active

10833007

ABSTRACT:
In a calibration method for a surface texture measuring instrument which measures a surface of a workpiece and includes an arm that is supported to be swingable around a base point thereof and is provided with a contact point at an end for scanning the workpiece surface, the calibration method includes a measurement step for measuring a calibration gauge of which cross section contains a part of a substantially perfect circle, an assignment step for assigning the detection results, which are obtained in the measurement step, in an evaluation formula based on a circle equation in which the center coordinates of the calibration gauge are (xc, zc) and the radius is “r”, and a calibration step for calibrating each parameter based on the evaluation formula obtained in the assignment step.

REFERENCES:
patent: 5669152 (1997-09-01), McMurtry
patent: 6633051 (2003-10-01), Holloway et al.
patent: 7036238 (2006-05-01), Kojima et al.
patent: A 8-338718 (1996-12-01), None
patent: A 9-329402 (1997-12-01), None
patent: A 10-332304 (1998-12-01), None

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