Calibration method

Details Calibration method Calibration method

2007-04-17

2007-04-17

Masih, Karen (Department: 2837)

Electricity: motive power systems

Positional servo systems

Program- or pattern-controlled systems

C318S568110, C318S568120, C318S568130, C318S568160, C901S047000

Reexamination Certificate

active

11403831

ABSTRACT:
In some preferred embodiments of the present invention, a method of performing calibration of an optical axis of a sensor installed on a hand of an arm of a robot by obtaining misalignment of the optical axis of the sensor relative to the hand or by obtaining misalignment of the hand relative to the arm is provided. A method of performing calibration by detecting a teaching tool11disposed at a semiconductor wafer placing position of a storage container or a carrying device by a sensor6installed on a hand5of a robot1to teach the position of the semiconductor wafer to the robot1includes a step of placing the teaching tool11at specified position with the robot1, a step of predicting the position of the teaching tool11detecting the teaching tool11with the sensor6, and a step of obtaining a difference between the position of the teaching tool11and the predicted value.

REFERENCES:
patent: 5600760 (1997-02-01), Pryor
patent: 2004/0245946 (2004-12-01), Halter
patent: 2000-190263 (2000-07-01), None
patent: 2002-110769 (2002-04-01), None
International Search Report PCT/JP2004/015061 date of mailing Dec. 28, 2004.

Affiliated with

Also associated with

Rating

Calibration method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Calibration method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Calibration method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3743116