Measuring and testing – Instrument proving or calibrating – Volume of flow – speed of flow – volume rate of flow – or mass...
Patent
1991-08-16
1993-06-01
Noland, Tom
Measuring and testing
Instrument proving or calibrating
Volume of flow, speed of flow, volume rate of flow, or mass...
73 3103, G01D 1800
Patent
active
052149528
ABSTRACT:
A calibration device utilizing a series of highly accurate mass flow controllers is provided for rapidly delivering ultra high purity calibration gas mixtures, and sample gas, to a gas analyzer at elevated temperature conditions. Steady flow rates are desirably provided to the highly sensitive analyzer. Valves exterior (20-25) and interior (3-5) to the heated compartment (9), heated by temperature controlled heater strips (9a), control the mixing of the reference gases with the sample gas and/or the flow of sample or calibration gas to the analyzer (16). The interior valves are diaphragm valves.
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Leggett Gregory H.
Sonricker Michael H.
Fritschler Alvin H.
Noland Tom
Praxair Technology Inc.
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