Calibration device and method for an optical defect scanner

Details Calibration device and method for an optical defect scanner Calibration device and method for an optical defect scanner

1980-12-23

1983-06-07

McGraw, Vincent P.

Optics: measuring and testing

Standard

356237, 2502521, G01N 2188

Patent

active

043868509

ABSTRACT:
A calibration device for an optical scanner for optically detecting microscopic defects on object surfaces is formed on a substrate having a characteristic pattern of a plurality of different arrays of artificially created defects. Each array is arranged by size and spacing of the artificial defects to represent an actual defect size. Each artificially created defect of a given array is of the same size. Each defect is provided with a surface which in response to an incident beam of light scatters the light. The response of the system to the scattered light forms a characteristic pattern which corresponds to actual defects.

REFERENCES:
patent: 2364609 (1944-12-01), Almquist
patent: 2936374 (1960-05-01), Zimmer
patent: 4236828 (1980-12-01), Kaneko et al.
"Reflectivity Reference Standard for Toner Concentration Sensor", Bilby, IBM Tech. Disc. Bulletin, vol. 21, #6, Nov. 1978, pp. 2235-2236.

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