Calibration apparatus for capacitance height gauges

Details Calibration apparatus for capacitance height gauges Calibration apparatus for capacitance height gauges

1984-03-14

1985-09-10

Swisher, S. Clement

Measuring and testing

Instrument proving or calibrating

Volume of flow, speed of flow, volume rate of flow, or mass...

324 61R, 324 74, 356356, G01B 2116

Patent

active

045398356

ABSTRACT:
In an electron beam lithography apparatus a capacitance height gauge is used to determine the distance between a reticule and electron optics. In order to calibrate the capacitance gauge an optical interferometer, including a mirror are mounted on the same axis as the capacitance gauge. The mirror is moved a predetermined distance so that the movement distance measured by the capacitance gauge and the interferometer can be compared.

REFERENCES:
patent: 3409774 (1968-11-01), Dykeman
patent: 3523735 (1970-08-01), Taylor
patent: 3986109 (1976-10-01), Poduje
patent: 4461569 (1984-07-01), Corbett

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