Calibration and measurment technique and apparatus for same

Details Calibration and measurment technique and apparatus for same Calibration and measurment technique and apparatus for same

1996-04-08

1998-03-31

Brown, Glenn W.

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Calibration

324628, G01R 3500

Patent

active

057342687

ABSTRACT:
A network analyzer system employs a calibration and measurement technique (300) to compensate for probe tip cross-talk. Calibration technique (310) calibrates standards (400, 500, 600) having variable probe separations. Error terms are produced for each separation. Continuous functions (702, 704, 706) are developed for the error terms as a function of distance. A device under test (802) can then be measured and a set of error terms is generated based on the separation between the probes. These error terms (902) are then used to correct the measurement of the device under test (802). A device under test (802) can thus be measured with various probe tip separations and differing impedances without having to re-calibrate the network analyzer.

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Butler, J.V., Rytting, D.K., Iskander, M.F., Pollard, R.D., Vanden M., "16-Term Error Model and Calibration Procedure for On-Wafer Network Analysis Measurements," Techniques, IEEE, vol. 39, No. 12, Dec. 1991, pp. 2211-2217.
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