Calibrating wafer and method for the production of a calibrating

Details Calibrating wafer and method for the production of a calibrating Calibrating wafer and method for the production of a calibrating

1998-08-27

2000-04-18

Raevis, Robert

Measuring and testing

Instrument proving or calibrating

G01J 102

Patent

active

060501251

ABSTRACT:
A calibrating wafer and a method for the production of a calibrating wafer having polymer microspheres. The polymer microspheres are subjected to a heat treatment in a temperature range in which the polymer microspheres start to soften.

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Patent Abstracts of Japan No. 1-272939 A (Kageyama), dated Oct. 31, 1989.

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