Calibrating multiple photoelectron spectroscopy systems

Details Calibrating multiple photoelectron spectroscopy systems Calibrating multiple photoelectron spectroscopy systems

2006-03-30

2008-11-25

Berman, Jack I. (Department: 2881)

Radiant energy

Electron energy analysis

C250S306000, C250S307000, C702S028000, C702S027000, C702S189000, C702S182000, C378S050000, C378S088000, C378S089000, C378S090000, C356S302000, C438S050000

Reexamination Certificate

active

07456399

ABSTRACT:
A method comprising obtaining a first set of spectral data for a first sample film measured by a first system, extracting intensities for one or more elemental species associated with the first sample film to provide a first set of extracted intensities using a function, and determining a first quantitative characteristic associated with the first sample film using the first set of extracted intensities. Next, obtain a second set of spectral data measured for a comparable sample film measured by a second photoelectron spectroscopy system. Next, apply the same function and continually adjust the function to extract intensities for the respective elemental species associated with the comparable sample film to provide a second set of corrected-extracted intensities. A second quantitative characteristic for the comparable sample is determined. The function is continually adjusted until the determined second quantitative characteristic closely or substantially matches the first quantitative characteristic.

REFERENCES:
patent: 6800852 (2004-10-01), Larson et al.
patent: 6891158 (2005-05-01), Larson et al.

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