Calibrating apparatus for isothermally introducing moisture into

Details Calibrating apparatus for isothermally introducing moisture into Calibrating apparatus for isothermally introducing moisture into

1993-02-16

1994-03-15

Miles, Tim

Gas and liquid contact apparatus

With external supply or removal of heat

Temperature or humidity sensor

261131, 261 63, 261153, 261104, B01F 304

Patent

active

052943780

ABSTRACT:
A calibrating apparatus for isothermally introducing, into a stream of dry gas, amounts of moisture lower than 1000 ppb, said apparatus comprising:

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Mikokami et al "Measurement of Trace Moisture in High Purity Gases with the Standard Moisture Generator (MG-10)" Microcontamination Conference Proceedings, Oct. 16-18, Cannon Communications, Inc., pp. 168-180.

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