Photocopying – Projection printing and copying cameras – Methods
Reexamination Certificate
2008-09-30
2011-11-15
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Methods
Reexamination Certificate
active
08059262
ABSTRACT:
The present invention provides a calculation method of calculating, by a computer, a light intensity distribution formed on an image plane of a projection optical system, comprising a step of dividing an effective light source formed on a pupil plane of the projection optical system into a plurality of point sources, a step of shifting a pupil function describing a pupil of the projection optical system for each of the plurality of point sources in accordance with positions thereof, thereby generating a plurality of shifted pupil functions, a step of defining a matrix including the plurality of pupil functions, a step of performing singular value decomposition of the matrix, thereby calculating an eigenvalue and an eigenfunction, and a step of calculating the light intensity distribution, based on a distribution of the light diffracted by the pattern of the mask, and the eigenvalue and the eigenfunction.
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Canon Kabushiki Kaisha
Canon U.S.A. Inc. IP Division
Kim Peter B
Liu Michael
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