Caging, calibration, characterization and compensation of micros

Details Caging, calibration, characterization and compensation of micros Caging, calibration, characterization and compensation of micros

1995-09-27

2000-08-29

McCall, Eric S.

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

310311, 338 2, G01P 15125

Patent

active

061091146

ABSTRACT:
The invention is embodied in a microstructural transducer including a microstructural platform, a movable microstructural member, a microstructural linkage elastically coupling the movable microstructural member to the microstructural platform, measuring apparatus for sensing displacement of the movable microstructural member relative to the platform and control apparatus for inducing at least one field near the movable member in accordance with a predetermined stimulus. The predetermined stimulus may be selected to perform any one of several functions, including caging, calibration, characterization and compensation.

REFERENCES:
patent: 3737684 (1973-06-01), Kuno et al.
patent: 4459759 (1984-07-01), Hulsing, II
patent: 4872342 (1989-10-01), Hanson et al.
patent: 4930043 (1990-05-01), Wiegand
patent: 4932261 (1990-06-01), Henrion
patent: 5134881 (1992-08-01), Henrion et al.
patent: 5211051 (1993-05-01), Kaiser et al.
patent: 5241861 (1993-09-01), Hulsing, II

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