Cage-type wafer carrier and method

Details Cage-type wafer carrier and method Cage-type wafer carrier and method

1986-05-16

1987-06-30

Schwartz, Larry I.

Drying and gas or vapor contact with solids

Apparatus

Trays or floors

269296, 206454, 211 41, 432261, F26B 2518

Patent

active

046760083

ABSTRACT:
A cage-type wafer carrier is provided which can be loaded and unloaded with semiconductor wafers by means of an automatic wafer transfer machine. No large slots are required in the bottom section of the cage-type carrier for allowing elevator lifts to pass therethrough to engage the wafers.

REFERENCES:
patent: 3951587 (1976-04-01), Alliegro et al.
patent: 4171740 (1979-10-01), Clement et al.
patent: 4568234 (1986-02-01), Lee et al.
patent: 4588086 (1986-05-01), Coe

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