Cage boat having removable slats

Details Cage boat having removable slats Cage boat having removable slats

1989-05-23

1991-10-08

Gehman, Bryon P.

Coating apparatus

Work holders, or handling devices

118728, 134 254, 134 31, 206454, 204297W, 211 41, 220 4B, 432253, B05C 1302, B65D 8548

Patent

active

050544187

ABSTRACT:
A cage boat having easily replaceable parts utilizes removable spacer rails for holding semiconductor wafers contained within a cage formed from slats removably attached to end pieces perpendicular to the slats.

REFERENCES:
patent: 2544053 (1951-03-01), Sharaf
patent: 3195272 (1965-07-01), Mosher et al.
patent: 3461842 (1969-08-01), Conrad et al.
patent: 3493142 (1970-02-01), Assmann
patent: 3737282 (1973-06-01), Hearn et al.
patent: 3796182 (1974-03-01), Rosler
patent: 3900039 (1975-08-01), Dietze et al.
patent: 3951587 (1976-04-01), Alliegro et al.
patent: 4098923 (1978-07-01), Alberti et al.
patent: 4264803 (1981-04-01), Shinko
patent: 4676008 (1987-06-01), Armstrong
patent: 4679689 (1987-07-01), Blome
patent: 4694778 (1987-09-01), Leon et al.
patent: 4841906 (1989-06-01), de Geest, Jr.
patent: 4861452 (1989-08-01), Stierman et al.
"Wafer Source Boat for Capsule Diffusion"; IBM Technical Disclosure Bulletin, vol. 13, No. 6, Nov. 1970.

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