Optics: measuring and testing – Dimension
Reexamination Certificate
2005-05-10
2005-05-10
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Dimension
C703S006000
Reexamination Certificate
active
06891626
ABSTRACT:
A library of simulated-diffraction signals for an integrated circuit periodic grating is generated by generating gets of intermediate layer data. Each set of intermediate layer data corresponding to a separate one of a plurality of hypothetical layers of a hypothetical profile of the periodic grating. Each separate hypothetical layer has one of a plurality of possible combinations of hypothetical values of properties for that hypothetical layer. The generated sets of intermediate layer data are stored. Simulated-diffraction signals for each of a plurality of hypothetical profiles are generated based on the stored generated sets of intermediate layer data.
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Jakatdar Nickhil Harshavardhan
Niu Xinhui
Morrison & Foerster
Punnoose Roy M.
Timbre Technologies, Inc.
Toatley , Jr. Gregory J.
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