Gas separation – Combined or convertible – In environmental air enclosure
Reexamination Certificate
2011-08-02
2011-08-02
Hopkins, Robert A (Department: 1776)
Gas separation
Combined or convertible
In environmental air enclosure
C055S434200, C055S444000, C055S456000, C055S457000, C055SDIG015, C062S055500
Reexamination Certificate
active
07988755
ABSTRACT:
Provided is a byproduct collecting apparatus for efficiently collecting reaction-byproducts contained in an exhaust gas exhausted from a process chamber during a semiconductor manufacturing process. The apparatus includes a housing and a trap module. The housing has a gas inlet port and a gas outlet port. The trap module is installed inside the housing and has first plates curved or inclined to guide an exhaust gas flow in a curved fashion.
REFERENCES:
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patent: 1996-24503 (1996-01-01), None
patent: 09-225230 (1997-09-01), None
patent: 10-2003-0017738 (2003-03-01), None
patent: 363205 (1999-07-01), None
International Search Report and Written Opinion for PCT/KR2007/002008 dated Aug. 9, 2007.
Cho Che-Hoo
Hong Jung-Eui
Hwang In-Mun
Kim Tae-Woo
Hopkins Robert A
Jenkins Wilson Taylor & Hunt, P.A.
Milaebo Co., Ltd.
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