Combustion – Flame holder having protective flame enclosing or flame... – Tubular member delineates flame
Reexamination Certificate
2006-09-26
2006-09-26
Cocks, Josiah C. (Department: 3749)
Combustion
Flame holder having protective flame enclosing or flame...
Tubular member delineates flame
C431S173000, C431S185000, C431S005000, C239S428000, C239S434000, C239S422000, C110S213000
Reexamination Certificate
active
07112060
ABSTRACT:
The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiH4and a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiO2to be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone (15), which is open toward a combustion chamber (11), surrounded by a peripheral wall (12), and closed by a plate (14) remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone (15), and the mixed gases are ejected toward the combustion chamber (11) perpendicularly to the plate (14).
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Ishikawa Keiichi
Kawamura Kotaro
Komai Tetsuo
Muroga Yasutaka
Nakamura Rikiya
Cocks Josiah C.
Ebara Corporation
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