Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1992-07-17
1994-07-05
Nguyen, Vinh
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
165 803, G01R 3102
Patent
active
053270754
ABSTRACT:
A burn-in apparatus used in burn-in tests includes a burn-in test chamber for accommodating a plurality of semiconductor devices to be tested. Also, the burn-in apparatus includes measuring devices for detecting electric characteristics of temperature sensors built in the respective semiconductor devices to individually measure junction temperatures of the semiconductor chips incorporated in the respective semiconductor devices, and laser beam irradiating mechanisms or electric heating members. The laser irradiating mechanisms or the heating members are controlled by control units, based on outputs of the measuring devices. Thus, the junction temperatures are maintained in a set junction temperature range, and the screening accuracy can be improved.
REFERENCES:
patent: 4145620 (1979-03-01), Dice
patent: 5047711 (1991-09-01), Smith et al.
Yu; "Self Heating Test Chip for Reliabilty Life Test"; IBM Technical Disclosure Bulletin; vol. 25, No. 7B; Dec. 1982; p. 3651.
Hashinaga Tatsuya
Nishiguchi Masanori
Nguyen Vinh
Sumitomo Electric Industries Ltd.
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