Buried undercut mesa-like waveguide

Details Buried undercut mesa-like waveguide Buried undercut mesa-like waveguide

1985-08-06

1988-02-16

Davie, James W.

Coherent light generators

Particular component circuitry

Optical pumping

372 46, G02B 610

Patent

active

047251123

ABSTRACT:
Epitaxial regrowth by vapor phase epitaxy of controlled composition semiconductor material in and around undercut regions of a processed heterostructure wafer permits formation of a ridge waveguide capable of active or passive operation. Subsequent material selective and crystallographically preferential etching is employed to form mirror facets on each end of the ridge waveguide.

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