Buried power buss utilized as a ground strap for high...

Details Buried power buss utilized as a ground strap for high... Buried power buss utilized as a ground strap for high...

2006-04-25

2006-04-25

Nhu, David (Department: 2818)

Semiconductor device manufacturing: process

Forming bipolar transistor by formation or alteration of...

Using epitaxial lateral overgrowth

C438S680000

Reexamination Certificate

active

07033901

ABSTRACT:
A method and system for providing a ground strap on a semiconductor device is disclosed. The method and system includes providing a substrate region and providing an epitaxial (EPI) layer over the substrate region. The method and system includes etching a plurality of device structures in the EPI layer and providing a slot in the semiconductor substrate that is in contact with the substrate region. Finally, the method and system includes oxidizing the slot except at the bottom of the slot and providing a metal within the slot.

REFERENCES:
patent: 4933743 (1990-06-01), Thomas et al.
patent: 5369291 (1994-11-01), Swanson
patent: 5436190 (1995-07-01), Yang et al.
patent: 5612567 (1997-03-01), Baliga
patent: 5614750 (1997-03-01), Ellul et al.
patent: 5691555 (1997-11-01), Zambrano et al.
patent: 5844273 (1998-12-01), Konishi
patent: 5894140 (1999-04-01), Terasawa
patent: 5903031 (1999-05-01), Yamada et al.
patent: 5929482 (1999-07-01), Kawakami et al.
patent: 6008127 (1999-12-01), Yamada
patent: 6020600 (2000-02-01), Miyajima et al.
patent: 6359374 (2002-03-01), Dausch et al.
patent: 6369425 (2002-04-01), Ferla et al.
patent: 6753592 (2004-06-01), Husher
patent: 6822290 (2004-11-01), Husher
patent: 6882053 (2005-04-01), Husher
patent: 6894393 (2005-05-01), Husher
patent: 2001/0055861 (2001-12-01), Patti et al.

Affiliated with

Also associated with

Rating

Buried power buss utilized as a ground strap for high... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Buried power buss utilized as a ground strap for high..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Buried power buss utilized as a ground strap for high... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3534815