Buried channel MOSFET using III-V compound semiconductors...

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Field effect transistor

Reexamination Certificate

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C257SE21409, C257SE27061, C438S172000, C438S282000

Reexamination Certificate

active

07964896

ABSTRACT:
A semiconductor-containing heterostructure including, from bottom to top, a III-V compound semiconductor buffer layer, a III-V compound semiconductor channel layer, a III-V compound semiconductor barrier layer, and an optional, yet preferred, III-V compound semiconductor cap layer is provided. The barrier layer may be doped, or preferably undoped. The III-V compound semiconductor buffer layer and the III-V compound semiconductor barrier layer are comprised of materials that have a wider band gap than that of the III-V compound semiconductor channel layer. Since wide band gap materials are used for the buffer and barrier layer and a narrow band gap material is used for the channel layer, carriers are confined to the channel layer under certain gate bias range. The inventive heterostructure can be employed as a buried channel structure in a field effect transistor.

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Extended European search report dated Sep. 14, 2009.

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