Buried antifuse

Fishing – trapping – and vermin destroying

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Details

437 43, 437170, 437228, 437922, 148DIG55, 365 96, 365163, H01L 2170, H01L 2700

Patent

active

051008270

ABSTRACT:
An integrated circuit having one or more antifuses which connect electrical components through a dielectric layer. The antifuse is formed before the thick dielectric is deposited and patterned to form windows which expose the antifuse.

REFERENCES:
patent: 4203123 (1980-05-01), Shanks
patent: 4442507 (1984-04-01), Rocsner
patent: 4569120 (1986-02-01), Stacy et al.
patent: 4599705 (1986-07-01), Holmberg et al.
patent: 4605872 (1986-08-01), Rung
patent: 4748490 (1988-05-01), Hollingsworth
patent: 4914055 (1990-04-01), Gordon et al.
patent: 4916090 (1990-04-01), Motai et al.
IEEE, 1986, "Amorphous Silicon Antifuse Technology for Bipolar Proms," by Messrs. Brian Cook and Steve Keller, p. 99.

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