Bulk delivery of ultra-high purity gases at high flow rates

Refrigeration – Storage of solidified or liquified gas – With vapor discharged from storage receptacle

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F17C 704

Patent

active

056735626

ABSTRACT:
In accordance with the present invention, methods and systems are provided which afford solutions to the problems of gas distribution of ultra-high purity ESGs at high gas flow rates. A first aspect of the invention is a system comprising a compressed liquefied gas container; an internal heat exchanger within the compressed liquefied gas container; a gas supply conduit which takes feed from the container and delivers the ESG to a process; and an external heat exchanger positioned effectively near the conduit downstream of the container but upstream of the process.

REFERENCES:
patent: 2842942 (1958-07-01), Johnston et al.
patent: 3282305 (1966-11-01), Antolak
patent: 3648018 (1972-03-01), Cheng et al.
patent: 3827246 (1974-08-01), Moen et al.
patent: 4219725 (1980-08-01), Groninger
patent: 4693252 (1987-09-01), Thoma et al.
patent: 5117639 (1992-06-01), Take
patent: 5359787 (1994-11-01), Mostowy, Jr. et al.
patent: 5373701 (1994-12-01), Siefering et al.
patent: 5426944 (1995-06-01), Li et al.
patent: 5478534 (1995-12-01), Louise et al.
Design and Operation of UHP Low Pressure and Reactive Gas Delivery Systems, S.M. Fine, M.A. George, J.T. McGuire, Semiconductor International, Oct. 1995, pp. 138-146.
Developing a Bulk Distribution System for High-Purity Hydrogen Chloride, N. Chowdhury, L. Mostowy, Micro, Sep. 1995, pp. 33-37.
Joule-Thomson Expansion and Corrosion in HCI Systems, P. Bhadha, E. Greene, Solid State Technology, Jul. 1992, pp. S3-S7.
Optimizing the UHP Gas Distribution System for a Plasma Etch Tool, S. Fine, J. McGuire, B-S. Choi, T. Bzik, K. Crofton, A. Melnyk, M. Perez, D. Sheriff, Solid State Technology, Mar. 1996, pp. 71-81.
Using Organosilanes to Inhibit Adsorption in Gas Delivery System, S. Fine, A. Johnson, J. Langan, B-S. Choi, J. McGuire, Solid State Technology, Apr. 1996, pp. 93-97.

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