Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2006-05-23
2011-11-15
Benson, Walter (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S31300R, C310S320000
Reexamination Certificate
active
08058768
ABSTRACT:
A bulk acoustic wave, BAW, resonator device comprising first and second metal layers (10, 20) and an intervening piezoelectric layer (30), the first metal layer (10) comprising spaced first and second portions (12, 14), wherein the first and second portions (12, 14) are each arranged as a plurality of interconnected fingers (16, 18), and wherein each of the plurality of fingers (16) of the first portion (12) is acoustically coupled to at least one of the fingers (18) of the second portion (14). In one embodiment the fingers of the first portion (12) are interlaced with the fingers (18) of the second portion (14), thereby providing direct coupling. In another embodiment the acoustic coupling between the fingers of the first and second portions is provided indirectly by further portions (15) of the first metal layer (10).
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Jansman Andreas B. M.
Loebl Hans-Peter
Milsom Robert F.
Ruigrok Jaap
Vanhelmont Frederik W. M.
Addison Karen B
Benson Walter
Schwabe Williamson & Wyatt
Triquint Semiconductor, Inc.
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