Bulk acoustic wave resonator

Details Bulk acoustic wave resonator Bulk acoustic wave resonator

2007-10-05

2009-06-02

Dougherty, Thomas M (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S367000

Reexamination Certificate

active

07541717

ABSTRACT:
A bulk acoustic wave resonator includes a resonator region having electrodes and a piezoelectric layer among the electrodes. The piezoelectric layer has a groove that bounds at least part of an electroacoustically active region of the piezoelectric layer. A depth of the groove is at least 50% of a thickness of the piezoelectric layer.

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