Bulk acoustic wave device and a method of its manufacturing

Details Bulk acoustic wave device and a method of its manufacturing Bulk acoustic wave device and a method of its manufacturing

2008-05-30

2010-06-01

Dougherty, Thomas M (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S321000, C029S025350, C216S002000, C216S039000

Reexamination Certificate

active

07728485

ABSTRACT:
A BAW device includes a semiconductor substrate with a surface region, an insulating layer formed on the surface region and a piezoelectric layer sandwiched by a first and second electrode, wherein the second electrode is formed on the insulating layer. The surface region is performed such that a voltage dependence of a capacitance between the substrate and the second electrode is substantially suppressed.

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