Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2011-07-19
2011-07-19
Benson, Walter (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S320000, C310S365000
Reexamination Certificate
active
07982363
ABSTRACT:
A method for fabricating a bulk acoustic wave (BAW) device comprising providing a growth substrate and growing an Group-III nitride epitaxial layer on the growth substrate. A first electrode is deposited on the epitaxial layer. A carrier substrate is provided and the growth substrate, epitaxial layer and first electrode combination is flip-chip mounted on the carrier substrate. The growth substrate is removed and a second electrode is deposited on the epitaxial layer with the epitaxial layer sandwiched between the first and second electrodes. A bulk acoustic wave (BAW) device comprises first and second metal electrodes and a Group-III nitride epitaxial layer sandwiched between the first and second electrodes. A carrier substrate is included, with the first and second electrodes and epitaxial layer on the carrier substrate.
REFERENCES:
patent: 4946547 (1990-08-01), Palmour et al.
patent: 5200022 (1993-04-01), Kong et al.
patent: 5210051 (1993-05-01), Carter, Jr. et al.
patent: RE34861 (1995-02-01), Davis et al.
patent: 5393993 (1995-02-01), Edmond et al.
patent: 5523589 (1996-06-01), Edmond et al.
patent: 5592501 (1997-01-01), Edmond et al.
patent: 6218680 (2001-04-01), Carter, Jr. et al.
patent: 6924583 (2005-08-01), Lin et al.
patent: 7112860 (2006-09-01), Saxler
patent: 2005/0093396 (2005-05-01), Larson et al.
patent: 2005/0184627 (2005-08-01), Sano et al.
patent: 2005/0248232 (2005-11-01), Itaya et al.
patent: 2005/0255234 (2005-11-01), Kanda et al.
patent: 2005/0287774 (2005-12-01), Shibata et al.
patent: 2006/0037183 (2006-02-01), Iwashita et al.
patent: 2006/0145785 (2006-07-01), Ishii et al.
patent: 2007/0040281 (2007-02-01), Nakayama et al.
Petroni et al., “GaN-Based Surface Acoustic Wave Filters for Wireless Communications”, Superlattices and Microstructures, 36 (2004), pp. 825-831.
Palacios et al., “Remote Collection and Measurement of Photogenerated Carriers Swept by Surface Acoustic Waves in GaN”, Applied Physics Letters, Vo. 84, No. 16, 3162-3168. Apr. 19, 2004.
Dubois, “Thin Film Bulk Acoustic Wave Resonators: A Technology Overview”, Memswave 03, Toulouse France, Jul. 2-4, 2003.
Official Search Report Prom European Patent Office, Dated: Sep. 25, 2008, European Patent Application No. 08251672.5.
Benson Walter
Cree Inc.
Gordon Bryan P
Koppel, Patrick, Heybl & Philpott
LandOfFree
Bulk acoustic device and method for fabricating does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Bulk acoustic device and method for fabricating, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Bulk acoustic device and method for fabricating will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2641524