Building blocks for integrated gas panel

Fluid handling – Systems – With flow control means for branched passages

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137269, F16K 1100

Patent

active

058363556

ABSTRACT:
A gas panel comprising a plurality of discreet blocks. The gas panel of the present invention includes a first functional component coupled to a first face of a first block wherein the first face has a first port configuration. A second functional component coupled to a first face of a second block wherein the first face of the second block has the first port configuration and wherein the first functional component is different than the second functional component.

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patent: 5368062 (1994-11-01), Okumura et al.
patent: 5439026 (1995-08-01), Moriya et al.
patent: 5662143 (1997-09-01), Caughran
"The World Standard for Ultraclean Gas Delivery Systems and Components" by Ultraclean Technology.

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