Ventilation – Clean room
Patent
1993-04-23
1994-09-27
Joyce, Harold
Ventilation
Clean room
553852, F24F 316
Patent
active
053503368
ABSTRACT:
A manufacturing plant is described for producing semiconductors that will function at a low production level during the initial phase. The plant can be expanded to provide a greater production volume with minimum additional investment, minimum disruption to the existing manufacturing line, and can be done quickly at minimum cost. Also described is a method for building a manufacturing plant for integrated circuit devices that can be operated at a low level during the initial phase, and provides for an efficient and rapid expansion to a higher level of manufacturing with minimum cost, and disruption to the existing line.
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Stephen Titus et al., "Defect Density Reduction in a Class 100 Fab Utilizing The Standard Mechanical Interface", Solid State Technology, PennWell Publishing Company, Nov. 1987.
Chen Hsing-Hai
Lu Chih-Yuan
Tseng Hsiao-Pin
Industrial Technology Research Institute
Joyce Harold
Saile George O.
Stoffel Wolmar J.
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