Buffered quartz crystal

Details Buffered quartz crystal Buffered quartz crystal

1991-12-23

1993-08-03

Stephan, Steven L.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310312, H01L 4108

Patent

active

052332616

ABSTRACT:
An AT-cut quartz crystal for a quartz crystal microbalance has a buffer layer sandwiched between an adhesion layer and an electrode layer on the front or deposition side of the crystal. The buffer layer can be a zinc layer of 6000 .ANG. sandwiched between a titanium or chromium adhesion layer of 100 to 160 .ANG. and a gold, silver, or aluminum outer electrode layer of about 2000 .ANG.. The zinc layer has a relatively low bulk modulus, and absorbs stress imposed by the deposited layer. The buffer layer prolongs useful crystal life, particularly when depositing dielectric materials. The crystal should have a modest surface roughness as keying-in structure.

REFERENCES:
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patent: 4383194 (1983-05-01), Ohigashi et al.
patent: 4433264 (1984-02-01), Nishiyama et al.
patent: 4692658 (1987-09-01), Kushida et al.
patent: 4848643 (1989-07-01), Frische et al.
Protective Coatings Against Corrosion in Metal Electrodes, Sep. 1972, p. 1088.
Schmid, Moglichkeiten und Grenzen der Schwingquartz-Schichtdickenmessung, Detoral Dissertation, Technical University of Vienna.
Wajid, Improving the Accuracy of a Quartz Crystal Microbalance with Automatic Determination of Acoustic Impedance Ratio, Rev. Sci. Instrum. 62(8), Aug. 1991 pp. 2026-2033.

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