Gas separation: processes – Degasification of liquid – And subsequent handling of evolved gas – stripping gas – or...
Reexamination Certificate
2007-08-13
2011-10-11
Rivell, John (Department: 3753)
Gas separation: processes
Degasification of liquid
And subsequent handling of evolved gas, stripping gas, or...
C095S024000, C096S157000, C096S219000, C210S436000, C210S472000
Reexamination Certificate
active
08034167
ABSTRACT:
A buffer tank for use in a liquid treatment apparatus applying a liquid treatment to a substrate surface by supplying thereto a treating liquid from a nozzle, the buffer tank is provided in a flow path of the treating liquid from a supply tank of the liquid to the nozzle, the buffer tank including an inlet port for introducing the treating liquid supplied from the supply tank into a buffer tank body, a first accumulation region in the buffer tank body for holding the treating liquid introduced into the buffer tank, a first vent port for discharging bubbles accumulated in the first accumulation region, a filter through which the treating liquid in the first accumulation region passes, the filter filtering the treating liquid, and a supplying port for supplying the treating liquid filtered with the filter to the nozzle.
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Rivell John
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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