Buffer system for a wafer handling system

Details Buffer system for a wafer handling system Buffer system for a wafer handling system

2005-03-01

2005-03-01

Rachuba, M. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

Computer controlled

C451S287000, C451S390000, C073S865800

Reexamination Certificate

active

06860790

ABSTRACT:
An apparatus is provided for supporting semiconductor wafer in a wafer processing system. The apparatus comprises at least two wafer support assemblies, defining respectively at least two wafer support levels and being mounted between opposing support beams; one or more supporting bases connected to or integral with each of the wafer support assemblies; and a motion unit coupled to the support beams.

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