Conveyors: fluid current – With means to control conveying fluid or movement of load in...
Patent
1977-12-05
1979-12-11
Makay, Albert J.
Conveyors: fluid current
With means to control conveying fluid or movement of load in...
414270, 414273, 414416, 198347, 406 72, B65G 5102
Patent
active
041781139
ABSTRACT:
Buffer storage apparatus is disclosed for use with a semiconductor wafer processing system having plurality of processing stations positioned along a conveyor structure and in which allowance must be made for different processing rates at different stations, the buffer storage apparatus including a first buffer storage station positioned between a first and a second processing station for temporarily holding wafers received from the first processing station and then conveying them to the second processing station, and a second buffer station positioned between the second processing station and the third processing station and including means for conveying a wafer received from the second processing station to the third processing station or for temporarily holding it.
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patent: 3730595 (1973-05-01), Yakubowski
patent: 3731823 (1973-05-01), Goth
patent: 3812947 (1974-05-01), Nygaard
patent: 3921788 (1975-11-01), Roberson, Jr. et al.
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patent: 3976330 (1976-08-01), Babinski
IBM Technical Disclosure Bulletin, vol. 18, No. 11, Apr. 1976.
Adams Michael J.
Beaver, II Robert I.
Hunt Susan L.
Key Paul F.
Prodanovich George L.
Macronetics, Inc.
Makay Albert J.
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