Buffer device for semiconductor processing apparatus

Details Buffer device for semiconductor processing apparatus Buffer device for semiconductor processing apparatus

2006-09-19

2006-09-19

Underwood, Donald (Department: 3652)

Material or article handling

Apparatus for charging a load holding or supporting element...

C414S941000, C294S103100

Reexamination Certificate

active

07108470

ABSTRACT:
The invention provides a buffer device for a processing apparatus for semiconductor components. The apparatus comprises a transportation track for conveying semiconductor components between processing machines, and a transfer mechanism for transferring semiconductor components between the transportation track and a receiving section of a processing machine along a travelling path. The buffer device is operative to receive and store semiconductor components from the transfer mechanism.

REFERENCES:
patent: 5176242 (1993-01-01), Wegscheider
patent: 5417537 (1995-05-01), Miller
patent: 5540542 (1996-07-01), Krajec et al.
patent: 5960960 (1999-10-01), Yamamoto
patent: 6536608 (2003-03-01), Buckley

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