Bubbler device for washing semiconductor materials

Details Bubbler device for washing semiconductor materials Bubbler device for washing semiconductor materials

1989-12-21

1991-05-14

Coe, Philip R.

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

134184, 134902, 261122, B08B 308

Patent

active

050147277

ABSTRACT:
A bubbler device is disclosed, which comprises of a suitable number of bubbling portions and is located on the bottom in a rinse vessel for washing semiconductor materials set in a carrier. The respective bubbling portions have a filter consisted of a fine mesh which enables passage of gas but hinders penetration of liquid, to thereby generate bubbles through the filter so as to promote the washing of semiconductor materials without penetration of the liquid. The filter is releasably mounted on the upper side of the bubbling portion.

REFERENCES:
patent: 2541838 (1951-02-01), Shardlow
patent: 3396950 (1968-08-01), Wood
patent: 4288394 (1981-09-01), Ewing et al.

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