Brush for cleaning wafer

Brushing – scrubbing – and general cleaning – Implements – Fabric

Reexamination Certificate

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Details

C015S102000, C015S230000, C015S244400

Reexamination Certificate

active

07469443

ABSTRACT:
In a formulation of a wafer cleaning brush, forming a polymer solution with a plurality of nano-scale porogens or with a synthetic pore forming agent and curing the polymer solution to form a porous polymeric material.

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