Brushing – scrubbing – and general cleaning – Implements – Fabric
Reexamination Certificate
2005-01-10
2008-12-30
Spisich, Mark (Department: 3727)
Brushing, scrubbing, and general cleaning
Implements
Fabric
C015S102000, C015S230000, C015S244400
Reexamination Certificate
active
07469443
ABSTRACT:
In a formulation of a wafer cleaning brush, forming a polymer solution with a plurality of nano-scale porogens or with a synthetic pore forming agent and curing the polymer solution to form a porous polymeric material.
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Liou Huey-Chiang
Moinpour Mansour
Tregub Alexander
Intel Corporation
Schwabe Williamson & Wyatt P.C.
Spisich Mark
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