Brushing – scrubbing – and general cleaning – Machines – Wiping
Patent
1997-12-31
1999-04-20
Graham, Gary K.
Brushing, scrubbing, and general cleaning
Machines
Wiping
15 971, 15 77, 152565, 15 931, B08B 1102
Patent
active
058946225
ABSTRACT:
A brush conditioner for a semiconductor wafer cleaning tool including a pair if opposed, rotating flexible brushes. The conditioner is a wing-like structure having a leading edge and a trailing edge. The leading edge is forced against the rotating brushes flexing them to assist in removal of foreign material. The trailing edge tapers to a point and provides stability to the wing.
REFERENCES:
patent: 5144711 (1992-09-01), Grill, Jr.
patent: 5311634 (1994-05-01), Andros
patent: 5442422 (1995-08-01), Owens, Jr. et al.
Amsden, deceased Michael R.
Bartley Richard A.
Manfredi Paul A.
Morris Raymond G.
Nadeau Douglas P.
Graham Gary K.
International Business Machines - Corporation
Walter, Jr. Howard J.
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