Brushing – scrubbing – and general cleaning – Machines – Brushing
Patent
1996-08-29
1999-07-20
Chin, Randall E.
Brushing, scrubbing, and general cleaning
Machines
Brushing
15 211, 15 883, 15102, A46B 1302, B08B 1100, B08B 1300
Patent
active
059241543
ABSTRACT:
A semiconductor processing system, such as a system for scrubbing both sides of a wafer at the same time, that includes a brush box containment apparatus for use with highly-acidic or other volatile chemical solutions, a roller positioning apparatus and a (brush) placement device.
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Gockel Thomas R.
Olson Lorin
Ravkin Michael
Ryle Lynn
Whitelaw Brett A.
Chin Randall E.
OnTrak Systems, Inc.
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