Optical: systems and elements – Lens – Multiple component lenses
Reexamination Certificate
2005-04-12
2005-04-12
Spector, David N. (Department: 2873)
Optical: systems and elements
Lens
Multiple component lenses
C359S784000, C359S793000
Reexamination Certificate
active
06879449
ABSTRACT:
The subject invention relates to broadband optical metrology tools for performing measurements of patterned thin films on semiconductor integrated circuits. Particularly a family of optical designs for broadband, multi-wavelength, DUV-IR (185<λ<900 nm) all-refractive optical systems. The designs have net focusing power and this is achieved by combining at least one positively powered optical element with one negatively powered optical element. The designs have small spot-size over the wavelength range spanning 185-900 nm with substantially reduced spherical aberration, axial color, sphero-chromatism and zonal spherical aberration. The refractive optical systems are broadly applicable to a large class of broadband optical wafer metrology tools including spectrophotometers, spectroscopic reflectometers, spectroscopic ellipsometers and spectroscopic scatterometers.
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Aikens David M.
Wang David Y.
Spector David N.
Stallman & Pollock LLP
Therma-Wave, Inc.
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