Radiant energy – Invisible radiant energy responsive electric signalling – Ultraviolet light responsive means
Patent
1994-04-14
1998-05-05
Hannaher, Constantine
Radiant energy
Invisible radiant energy responsive electric signalling
Ultraviolet light responsive means
25033911, 356448, G01N 2133
Patent
active
057478139
ABSTRACT:
An improved method and apparatus for measuring the relative reflectance spectra of an observed sample (3) and method and apparatus for autofocussing the sample (3). A broadband visible and ultraviolet beam (42) is split into a sample beam (46) and a reference beam (48). The sample beam (46) is reflected off the surface of the sample (3), and the spectrum of the reflected sample beam (46) is compared to the spectrum of the reference beam (48) to determine the relative reflectance spectrum of the sample (3). A video camera (96) is provided for viewing the sample (3). The autofocus system has a course-focus mode and a fine-focus mode. In the course-focus mode, the sample (3) is focused when the centroid of the sample image is centered on a position sensitive detector (99). In the fine-focus mode, the sample is focused when the intensity of light reaching the detector (99) is minimized.
REFERENCES:
patent: Re34783 (1994-11-01), Coates
patent: 3214596 (1965-10-01), Schwerdt, Jr. et al.
patent: 3752559 (1973-08-01), Fletcher et al.
patent: 3975084 (1976-08-01), Block
patent: 3999855 (1976-12-01), Hirschfeld
patent: 4106856 (1978-08-01), Babish
patent: 4158505 (1979-06-01), Mathisen et al.
patent: 4645349 (1987-02-01), Tabata
patent: 4712912 (1987-12-01), Messerschmidt
patent: 4758088 (1988-07-01), Doyle
patent: 4770530 (1988-09-01), Van Aken et al.
patent: 4795256 (1989-01-01), Krause et al.
patent: 4844617 (1989-07-01), Kelderman et al.
patent: 4848904 (1989-07-01), Sapp et al.
patent: 4899055 (1990-02-01), Adams
patent: 4906844 (1990-03-01), Hall
patent: 4945220 (1990-07-01), Mallory et al.
patent: 4983823 (1991-01-01), Isobe
patent: 5067805 (1991-11-01), Corle et al.
Mallory Chester L.
Norton Adam E.
Pham Hung V.
Rasmussen Paul
Hannaher Constantine
KLA-Tencop. Corporation
LandOfFree
Broadband microspectro-reflectometer does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Broadband microspectro-reflectometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Broadband microspectro-reflectometer will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-57017