Broadband microfabriated ultrasonic transducer and method of fab

Details Broadband microfabriated ultrasonic transducer and method of fab Broadband microfabriated ultrasonic transducer and method of fab

1996-10-29

1999-02-09

Eldred, J. Woodrow

Communications, electrical: acoustic wave systems and devices

Signal transducers

Underwater type

367174, 381113, 381116, 381174, 381191, H04R 2300

Patent

active

058703519

ABSTRACT:
A broadband microfabricated ultrasonic transducer which includes a plurality of resonant membranes of different sizes and/or shapes supported above a conductive substrate.

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